Now You Can Call on INFICON Diagnostic Expertise to Monitor and Troubleshoot Your Process Anywhere, Anytime.
eFabGuard Global Support Network
Each tool has a dedicated computer running FabGuard software, which controls INFICON and other in situ sensors and collects tool data. FabGuard Executive manages information traffic between the tool and FabGuard Remote. FabGuard Executive can also be connected to a local network. eFabGuard connects FabGuard to INFICON anywhere at any time via secure VPN.
Go beyond e-diagnostics with eFabGuard, the first Internet- based monitoring network with multi-sensor analysis and diagnostic capability for semiconductor tools and processes. It works with our FabGuard Sensor Integration and Analysis System to let you stay connected to your process - and to INFICON semiconductor and vacuum specialists, who can use eFabGuard to remotely view data to help analyze and troubleshoot problems. The result is improved tool uptime and greater productivity.
Faster Response to Process Problems with Multi-sensor Analysis and Diagnostics.
The FabGuard Sensor Integration and Analysis System can monitor every sensor on every tool in your process to:
- provide run-by-run and real-time analysis for process control and fault detection determine endpoint
- decrease MTTR and tool recovery time
- detect and classify faults for quicker response to problems and less downtime
- automatically collect and store data to enhance SPC
- integrate data from multiple sensors for convenient access and analysis
- provide an overall understanding of tool/process health to aid preventive maintenance personnel
eFabGuard at a Glance
With eFabGuard, INFICON experts working with on-site engineers can:
- immediately view tool or process problems
- collaborate to detect and classify tool drift early, schedule routine maintenance more efficiently, and develop new applications
- maintain FabGuard analysis recipes
- monitor sensor performance
INFICON Experts Work With You to Help Improve Uptime and Productivity
eFabGuard takes the wealth of FabGuard data and makes it available to INFICON experts and fab personnel over a highly secure, Internet-based virtual private network (VPN) 24 hours a day. That allows you to easily and efficiently draw on the specialized expertise and applications knowledge we've developed through years of experience in advanced process control and fault detection-expertise and knowledge that can help you solve problems faster.
Your Data is Protected
eFabGuard sends and receives data via an industry-proven virtual private network (VPN) that combines the accessibility of the Internet with the high security, privacy and quality of service of a dedicated network. Sophisticated data encryption (3DES and IPSec), built into the operating system or router, along with other measures ensure the confidentiality of your proprietary process information.
By letting you and the experts at INFICON simultaneously and securely monitor all tool and process data from anywhere in the world, eFabGuard gives you unprecedented capabilities to detect and classify faults, improve overall equipment effectiveness and maximize uptime-all faster and more cost- effectively than with on-site service.
ASSOCIATED TECHNICAL INFORMATION
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Brochure - eFabGuard Global Support Network
English
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ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
|
|
Brochure - eFabGuard Global Support Network
English
|
|
|
